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Solar-blind photodetectors for harsh electronics
Dung-Sheng Tsai1, Wei-Cheng Lien, Der-Hsien Lien
11] Institute of Photonics and Optoelectronics & Department of Electrical Engineering, National Taiwan University, Taipei 10617, Taiwan, ROC [2].
Scientific Reports
|September 12, 2013
Summary
We developed new deep ultraviolet photodetectors using aluminum nitride (AlN) thin films on silicon. These devices exhibit exceptional performance in harsh environments, including high temperatures and radiation.
Area of Science:
- Materials Science
- Optoelectronics
- Semiconductor Devices
Background:
- Deep ultraviolet (DUV) photodetectors are crucial for various applications, but often face limitations in extreme conditions.
- Aluminum nitride (AlN) is a promising material for DUV applications due to its wide bandgap and inherent stability.
- Developing robust photodetectors for harsh environments, such as high temperatures and radiation, remains a significant challenge.
Purpose of the Study:
- To demonstrate the efficacy of AlN thin films on Si(100) substrates for fabricating solar-blind photodetectors (PDs).
- To evaluate the performance characteristics of these AlN PDs under challenging operational conditions, including elevated temperatures and proton irradiation.
- To assess the potential of AlN metal-semiconductor-metal (MSM) PDs for next-generation DUV sensing in demanding environments.
Main Methods:
- Fabrication of AlN thin films on Si(100) substrates.
- Characterization of AlN metal-semiconductor-metal (MSM) photodetector performance.
- Testing under varying temperatures (up to 300°C) and proton fluences (up to 10^13 cm^-2 of 2-MeV protons).
Main Results:
- Achieved solar-blind photodetectors with extremely low dark current (~1 nA) even at bias voltages exceeding 200 V.
- Demonstrated excellent temperature tolerance up to 300°C and high radiation hardness up to 10^13 cm^-2 of 2-MeV proton fluences.
- Observed fast photoresponse times: ~110 ms rise time and ~80 ms fall time at 5 V bias.
Conclusions:
- AlN thin films on Si(100) substrates are highly suitable for creating robust solar-blind photodetectors.
- The developed AlN MSM PDs exhibit superior performance metrics, including low dark current, high temperature tolerance, and radiation hardness.
- These findings highlight the significant potential of AlN MSM PDs for advanced DUV detection applications in harsh environments.

