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Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model
Published on: May 23, 2018
Solution-processed phase-change VO(2) metamaterials from colloidal vanadium oxide (VO(x)) nanocrystals.
Taejong Paik1, Sung-Hoon Hong, E Ashley Gaulding
1Department of Chemistry, ‡Department of Electrical and Systems Engineering, §Department of Materials Science and Engineering, ⊥Department of Physics and Astronomy, and ∥Department of of Bioengineering, University of Pennsylvania , Philadelphia, Pennsylvania 19104, United States.
We developed thermally switchable vanadium dioxide (VO2) metamaterials using colloidal nanocrystals. Tungsten doping tunes the metal-insulator transition temperature, enabling tunable optical responses in nanostructures.
Area of Science:
- Materials Science
- Nanotechnology
- Condensed Matter Physics
Background:
- Metamaterials offer unique optical properties.
- Vanadium dioxide (VO2) exhibits a thermally induced metal-insulator phase transition.
- Controlling this transition is key for advanced optical applications.
Purpose of the Study:
- To demonstrate thermally switchable VO2 metamaterials fabricated from solution-processable colloidal nanocrystals.
- To tune the phase transition temperature using tungsten doping.
- To engineer multilayered VO2 films and nanostructures with temperature-dependent optical responses.
Main Methods:
- Synthesis of vanadium oxide (VOx) nanocrystals via nonhydrolytic reaction.
- Formation of nanocrystal thin films from colloidal dispersions.
- Rapid thermal annealing to form VO2 films.
- Tungsten doping of colloidal VOx nanocrystals.
- Fabrication of multilayered VO2 films and nanopillar arrays using nanoimprinting.
Main Results:
- Achieved sharp, reversible metal-insulator phase transitions in nanocrystalline VO2 thin films.
- Demonstrated that tungsten doping lowers the transition temperature of VO2.
- Engineered multilayered VO2 films with tailored optical responses (absorber to reflector) with temperature.
- Fabricated 3D VO2 nanopillar arrays with temperature-tunable plasmonic properties.
Conclusions:
- Solution-processable colloidal nanocrystals are a viable route for fabricating switchable VO2 metamaterials.
- Precise control over doping and nanostructure patterning enables tunable optical functionalities.
- These materials hold promise for applications in tunable optics, sensors, and smart devices.

