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Design and testing of a novel multi-stroke micropositioning system with variable resolutions
1Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Av. Padre Tomás Pereira, Taipa, Macao SAR, China.
The Review of Scientific Instruments
|March 6, 2014
Summary
This study introduces a novel micro/nanopositioning stage with multiple motion strokes and resolutions, driven by a single actuator per axis. The design utilizes a variable stiffness mechanism and strain sensors for enhanced precision in micro/nanopositioning applications.
Area of Science:
- Mechanical Engineering
- Nanotechnology
- Precision Engineering
Background:
- Micro-/nanopositioning applications require stages with multiple motion strokes and resolutions.
- Conventional multi-actuation stages face interference issues between drives.
Purpose of the Study:
- To present a novel multi-stroke, multi-resolution micropositioning stage design.
- To eliminate drive interference issues present in conventional designs.
- To achieve variable stiffness and position resolutions within a single stage.
Main Methods:
- Conceptual design of a fully compliant variable stiffness mechanism.
- Integration of resistive strain sensors for variable resolution.
- Development of analytical models for motion strokes and resolution ratios.
- Finite-element analysis (FEA) for model verification.
- Fabrication and testing of a proof-of-concept XY stage prototype.
Main Results:
- The proposed stage design successfully integrates multi-stroke and multi-resolution capabilities.
- Variable stiffness and position resolutions were achieved using the compliant mechanism and sensors.
- Analytical models were validated through FEA simulations.
- Experimental testing confirmed the effectiveness of the design for micro-/nanopositioning.
Conclusions:
- The novel single-actuator driven multi-stroke, multi-resolution stage is feasible and effective.
- This design offers a solution to interference issues in conventional multi-actuation stages.
- The developed technology enhances precision and flexibility in micro-/nanopositioning applications.
