Related Experiment Video
Updated: Apr 27, 2026

Video-rate Scanning Confocal Microscopy and Microendoscopy
Published on: October 20, 2011
MEMS-BASED 3D CONFOCAL SCANNING MICROENDOSCOPE USING MEMS SCANNERS FOR BOTH LATERAL AND AXIAL SCAN
Lin Liu1, Erkang Wang1, Xiaoyang Zhang1
1Dept. of Electrical & Computer Engineering, University of Florida, Gainesville, FL 32611.
Abstract:
A fiber-optic 3D confocal scanning microendoscope employing MEMS scanners for both lateral and axial scan was designed and constructed. The MEMS 3D scan engine achieved a lateral scan range of over ± 26° with a 2D MEMS scanning micromirror and a depth scan of over 400 μm with a 1D MEMS tunable microlens. The lateral resolution and axial resolution of this system were experimentally measured as 1.0 μm and 7.0 μm, respectively. 2D and 3D confocal reflectance images of micro-patterns, micro-particles, onion skins and acute rat brain tissue were obtained by this MEMS-based 3D confocal scanning microendoscope.
Related Concept Videos
Confocal Fluorescence Microscopy
Three-Dimensional Microscopy in Microbiology
Scanning Electron Microscopy
Fundamental Principles
Accelerated...
Overview of Microscopy Techniques

