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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
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CMOS compatible monolithic multi-layer Si₃N₄₋ on-SOI platform for low-loss high performance silicon photonics dense

Ying Huang, Junfeng Song, Xianshu Luo

    Optics Express
    |October 17, 2014
    PubMed

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