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Updated: Apr 19, 2026
Atomically Traceable Nanostructure Fabrication
Published on: July 17, 2015
Direct nano-scale patterning of Ag films using hard X-ray induced oxidation
Jae Myung Kim1, Su Yong Lee2, Hyon Chol Kang3
1Department of Physics and Photon Science and School of Materials Science and Engineering, Gwangju Institute of Science and Technology, Gwangju 500-712, Korea.
Abstract:
The morphological change of silver nano-particles (AgNPs) exposed to an intense synchrotron X-ray beam was investigated for the purpose of direct nano-scale patterning of metal thin films. AgNPs irradiated by hard X-rays in oxygen ambient were oxidized and migrated out of the illuminated region. The observed X-ray induced oxidation was utilized to fabricate nano-scale metal line patterns using sectioned WSi2/Si multilayers as masks. Lines with a width as small as 21 nm were successfully fabricated on Ag films on silicon nitride. Au/Ag nano-lines were also fabricated using the proposed method.
