A compact time-of-flight mass spectrometer for ion source characterization.

Area of Science:

• Physics
• Analytical Chemistry
• Plasma Science

Background:

• Ion source characterization is crucial for understanding various plasma applications.
• Existing mass spectrometers may lack the necessary compactness or resolution for certain diagnostic tasks.

Purpose of the Study:

• To develop and present a compact time-of-flight mass spectrometer for ion source characterization.
• To evaluate the performance metrics, including mass resolution and ion energy detection range.

Main Methods:

• Design and construction of a compact time-of-flight mass spectrometer utilizing orthogonal injection and angle reflection.
• Optimization of mass resolution to approximately 1690 (FWHM).
• Testing the ion energy detection range from approximately 3 to 163 eV using an electron impact ion source.

Main Results:

• Achieved a mass resolution of approximately 1690 (FWHM).
• Demonstrated an ion energy detection range of 3–163 eV.
• The developed spectrometer has compact dimensions (413 × 250 × 414 mm).

Conclusions:

• The developed compact time-of-flight mass spectrometer is a valuable diagnostic tool.
• Its high mass resolution and compact design facilitate fundamental research on ion spectra.
• Enables the study of plasma mass-to-charge composition across a wide parameter range.