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Updated: Apr 15, 2026

Epitaxial Growth of Perovskite Strontium Titanate on Germanium via Atomic Layer Deposition
Published on: July 26, 2016
Nucleation and growth of primary nanostructures in SrTiO3 homoepitaxy
Soo-Hyon Phark1, Young Jun Chang2
1Center for Correlated Electron Systems, Institute for Basic Science (IBS), Seoul National University, Seoul, 151-747 Republic of Korea ; Department of Physics and Astronomy, Seoul National University, Seoul, 151-747 Republic of Korea.
Abstract:
SrTiO3 nanoislands on SrTiO3 (001) in a diffusion-limited growth regime were studied using in situ scanning tunneling microscopy (STM). The STM images revealed two characteristic features of nucleation stages. First, the minimum lateral size of the one-unit-cell (uc)-high SrTiO3 islands was 4 × 4 uc (2). Second, one-dimensional SrTiO3 islands of a 4 uc width grew along the crystal symmetry directions. These observations suggest that 4 × 4-uc (2) islands act as a minimum nucleation seed, and the addition of SrTiO3 molecular species of the same width is the primary and dominant growth process in SrTiO3 homoepitaxy. A close inspection of the surface of the substrate during the deposition process revealed possible connections between surface reconstruction and energetically favorable nucleation of SrTiO3 islands.

