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Updated: Apr 13, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

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Aberration-corrected STEM for atomic-resolution imaging and analysis

O L Krivanek1,2, T C Lovejoy1, N Dellby1

  • 1Nion Co., Kirkland, Washington, U.S.A.

Journal of Microscopy
|May 6, 2015
PubMed

Keywords:
Aberration correctionelectron energy loss spectroscopyelectron monochromatorenergy-analyzed Rutherford scatteringenergy-dispersive X-ray spectroscopyhigh-order aberrationsmonochromated electron beamsscanning transmission electron microscopy (STEM)vibrational spectroscopy

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