Electron Microscope Tomography and Single-particle Reconstruction
Transmission Electron Microscopy
Scanning Electron Microscopy
Overview of Electron Microscopy
Overview of Microscopy Techniques
Atomic Force Microscopy
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Updated: Apr 13, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
O L Krivanek1,2, T C Lovejoy1, N Dellby1
1Nion Co., Kirkland, Washington, U.S.A.
Aberration-corrected electron microscopes achieve sub-100 pm electron beams for atomic-resolution imaging and spectroscopy. This technology enables detailed material analysis at the single-atom level.
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