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Related Concept Videos

Electron Microscope Tomography and Single-particle Reconstruction01:07

Electron Microscope Tomography and Single-particle Reconstruction

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Transmission electron microscopy (TEM) can be used to determine the 3D structure of biological samples with the help of techniques such as electron microscope tomography and single-particle reconstruction. While single-particle reconstruction can examine macromolecules and macromolecular complexes in vitro conditions only, tomography permits the study of cell components or small cells in vivo.
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Transmission Electron Microscopy01:15

Transmission Electron Microscopy

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In 1931, physicist Ernst Ruska—building on the idea that magnetic fields can direct an electron beam just as lenses can direct a beam of light in an optical microscope—developed the first prototype of the electron microscope. This development led to the development of the field of electron microscopy. In the transmission electron microscope (TEM), electrons are produced by a hot tungsten element and accelerated by a potential difference in an electron gun, which gives them up to 400...
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Scanning Electron Microscopy01:07

Scanning Electron Microscopy

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A scanning electron microscope (SEM) is used to study the surface features of a sample by using an electron beam that scans the sample surface in a two-dimensional manner. Typically, areas between ~1 centimeter to 5 micrometers in width can be imaged. SEM can be used to image bacteria, viruses, tissues as well as larger samples like insects. Conventional SEM gives a magnification ranging from 20X to 30,000X and spatial resolution of 50 to 100 nanometers.
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Overview of Electron Microscopy01:25

Overview of Electron Microscopy

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The wavelengths of visible light ultimately limit the maximum theoretical resolution of images created by light microscopes. Most light microscopes can only magnify 1000X, and a few can magnify up to 1500X. Electrons, like electromagnetic radiation, can behave like waves, but with wavelengths of 0.005 nm, they produce significantly greater resolution up to 0.05 nm as compared to 500 nm for visible light. An electron microscope (EM) can create a sharp image that is magnified up to 2,000,000X.
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Overview of Microscopy Techniques01:22

Overview of Microscopy Techniques

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The early pioneers of microscopy opened a window into the invisible world of microorganisms. In 1830, Joseph Jackson Lister created an essentially modern light microscope. The 20th century saw the development of microscopes that leveraged nonvisible light, such as fluorescence microscopy that uses an ultraviolet light source and electron microscopy that uses short-wavelength electron beams. These advances significantly improved magnification, image resolution, and contrast. By comparison, the...
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Atomic Force Microscopy01:08

Atomic Force Microscopy

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Atomic force microscopy (AFM) is a type of scanning probe microscopy that can analyze topographic details of various specimens like ceramics, glass, polymers, and biological samples. AFM offers over 1000 times more resolution than the optical imaging system. Images generated from AFM are three-dimensional surface profiles, offering an advantage over the flat, two-dimensional images from other imaging techniques.
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Polarization Selectivity in Vibrational Electron-Energy-Loss Spectroscopy.

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Progress in ultrahigh energy resolution EELS.

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Electron-Beam Mapping of Vibrational Modes with Nanometer Spatial Resolution.

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Improvements in the X-ray analytical capabilities of a scanning transmission electron microscope by spherical-aberration correction.

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Atomic-scale chemical imaging of composition and bonding by aberration-corrected microscopy.

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Related Experiment Video

Updated: Apr 13, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

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Aberration-corrected STEM for atomic-resolution imaging and analysis.

O L Krivanek1,2, T C Lovejoy1, N Dellby1

  • 1Nion Co., Kirkland, Washington, U.S.A.

Journal of Microscopy
|May 6, 2015
PubMed
Summary
This summary is machine-generated.

Aberration-corrected electron microscopes achieve sub-100 pm electron beams for atomic-resolution imaging and spectroscopy. This technology enables detailed material analysis at the single-atom level.

Keywords:
Aberration correctionelectron energy loss spectroscopyelectron monochromatorenergy-analyzed Rutherford scatteringenergy-dispersive X-ray spectroscopyhigh-order aberrationsmonochromated electron beamsscanning transmission electron microscopy (STEM)vibrational spectroscopy

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Last Updated: Apr 13, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
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Area of Science:

  • Materials Science
  • Physics
  • Chemistry

Background:

  • Development of aberration-corrected scanning transmission electron microscopes (STEM) capable of producing electron beams smaller than 100 picometers.
  • These sub-atomic resolution electron beams allow for probing materials with unprecedented detail.

Discussion:

  • Atomic-resolution imaging and spectroscopy (electron energy loss and energy-dispersive X-ray) from single atomic columns and individual atoms.
  • Generation of atomic-resolution elemental maps for precise material characterization.
  • Review of the historical development and diverse applications of aberration-corrected STEM.

Key Insights:

  • Achieved sub-100 pm electron beams in aberration-corrected STEM, enabling single-atom analysis.
  • Demonstrated atomic-resolution imaging, spectroscopy, and elemental mapping.
  • Highlighted the capability to analyze materials at the single-atom level.

Outlook:

  • Advancements in controlling geometric aberrations up to fifth order.
  • Ultra-high-energy resolution Electron Energy Loss Spectroscopy (EELS) for vibrational spectroscopy in electron microscopes.
  • Future directions in aberration-corrected STEM for advanced materials research.