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Updated: Apr 8, 2026

A Fabrication and Measurement Method for a Flexible Ferroelectric Element Based on Van Der Waals Heteroepitaxy
Published on: April 8, 2018
Negative Capacitance in Organic/Ferroelectric Capacitor to Implement Steep Switching MOS Devices.
Jaesung Jo1, Woo Young Choi2, Jung-Dong Park3
1†School of Electrical and Computer Engineering, University of Seoul, Seoul 130-743, Republic of Korea.
Researchers overcame the "Boltzmann tyranny" in metal-oxide-semiconductor (MOS) devices by using negative capacitance. This breakthrough achieved a subthreshold slope of 18 mV/decade, significantly improving device performance at room temperature.
Area of Science:
- Materials Science
- Semiconductor Physics
- Electronics Engineering
Background:
- The "Boltzmann tyranny" limits metal-oxide-semiconductor (MOS) devices, requiring a minimum gate voltage for current increase, resulting in a subthreshold slope (SS) of at least 60 mV/decade at 300 K.
- Existing MOS technology faces physical limitations due to the nonscalability of thermal voltage, hindering further miniaturization and efficiency gains.
Purpose of the Study:
- To experimentally demonstrate a sub-60 mV/decade subthreshold slope in MOS devices.
- To address the fundamental limitations imposed by Boltzmann tyranny in conventional MOS transistors.
- To explore the application of negative capacitance for enhanced voltage amplification in semiconductor devices.
Main Methods:
- Integration of a ferroelectric material exhibiting negative capacitance into the gate stack of a MOS device.
- Utilizing the unique energy dynamics during ferroelectric phase transitions to achieve internal voltage amplification.
- Employing a series-connected negative capacitor as an assistive component to boost surface potential.
Main Results:
- Achieved a steep subthreshold slope (SS) of approximately 18 mV/decade at 300 K, significantly below the theoretical limit of conventional MOS devices.
- Demonstrated internal voltage amplification within the MOS device, where surface potential exceeded the applied gate voltage.
- Reliably observed steep switching behavior attributed to the negative capacitance effect.
Conclusions:
- Negative capacitance in ferroelectric materials offers a viable solution to overcome the Boltzmann tyranny in MOS devices.
- This approach enables subthreshold slopes significantly steeper than the 60 mV/decade limit, paving the way for more efficient electronics.
- The integration of negative capacitance provides a pathway for internal voltage step-up conversion, enhancing MOS device performance.
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