Crack-Photolithography for Membrane-Free Diffusion-Based Micro/Nanofluidic Devices.

Minseok Kim1, Taesung Kim1

  • 1Department of Mechanical Engineering, ‡Department of Biomedical Engineering, Ulsan National Institute of Science and Technology (UNIST) , 50 UNIST-gil, Eonyang-eup, Ulsan, 689-798, Republic of Korea.

Summary

A new crack-photolithography technique enables rapid, low-cost fabrication of micro/nanofluidic devices. This method precisely creates mixed-scale patterns for advanced diffusion control in biological and chemical applications.

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