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Continuum models of focused electron beam induced processing.

Milos Toth1, Charlene Lobo1, Vinzenz Friedli2

  • 1School of Physics and Advanced Materials, University of Technology, Sydney, 15 Broadway, Ultimo, New South Wales 2007, Australia.

Beilstein Journal of Nanotechnology
|October 2, 2015
PubMed
Summary
This summary is machine-generated.

Focused electron beam induced processing (FEBIP) models enable nanostructure fabrication and editing. New software simulates diverse FEBIP processes, including etching and deposition with various precursors and gas mixtures.

Keywords:
continuum modeldepositionelectron beam processingetchinggas injection system

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Computational Modeling

Background:

  • Focused electron beam induced processing (FEBIP) offers direct-write, high-resolution fabrication and editing of nanostructured materials.
  • Existing modeling techniques for FEBIP are diverse, requiring advanced simulation capabilities.
  • Understanding precursor interactions and reaction pathways is crucial for controlling FEBIP outcomes.

Purpose of the Study:

  • To detail continuum techniques for modeling FEBIP processes.
  • To release user-friendly software for simulating a wide range of FEBIP applications.
  • To provide a comprehensive review and software for Monte Carlo modeling of precursor gas flux.

Main Methods:

  • Development and application of continuum models for FEBIP.
  • Simulation of FEBIP processes including physisorption, chemisorption, and gas mixtures.
  • Implementation of Monte Carlo methods for precursor gas flux modeling.

Main Results:

  • Validated continuum models capable of simulating various FEBIP processes.
  • Released software for simulating FEBIP etching and deposition, including simultaneous processes (FEBIE/FEBID).
  • Provided software for Monte Carlo simulation of precursor gas flux, essential for continuum models.

Conclusions:

  • The developed continuum models and software provide a powerful tool for simulating and understanding FEBIP.
  • This work facilitates the design and optimization of nanostructure fabrication and editing using FEBIP.
  • The released software enhances accessibility and applicability of advanced FEBIP simulations in research and development.