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Author Spotlight: A Machine-Vision Approach to Transmission Electron Microscopy Workflows, Results Analysis and Data Management
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Continuum models of focused electron beam induced processing

Milos Toth1, Charlene Lobo1, Vinzenz Friedli2

  • 1School of Physics and Advanced Materials, University of Technology, Sydney, 15 Broadway, Ultimo, New South Wales 2007, Australia.

Beilstein Journal of Nanotechnology
|October 2, 2015
PubMed

Keywords:
continuum modeldepositionelectron beam processingetchinggas injection system

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