High angular accuracy manufacture method of micro v-grooves based on tool alignment by on-machine measurement

Area of Science:

• Optics and Photonics
• Precision Engineering
• Metrology

Background:

• Micro v-grooves are essential optical components, but their performance depends heavily on precise angular geometry.
• Conventional diamond cutting methods struggle to guarantee v-groove angle accuracy due to limitations in tool measurement and mounting.
• Fabrication quality is directly impacted by the accuracy of the cutting tool's angle.

Purpose of the Study:

• To propose and validate an on-machine measurement method for enhancing the angular accuracy of micro v-grooves.
• To address the limitations of existing diamond cutting techniques in achieving precise v-groove angles.
• To improve the overall quality and performance of micro v-grooves in optical applications.

Main Methods:

• Development of an on-machine measurement system utilizing a probe for precise scanning of v-groove geometry.
• Analysis of system error models, data processing algorithms, and tool alignment strategies.
• Fabrication and measurement of retro-reflection mirrors for experimental verification.

Main Results:

• The proposed on-machine measurement method enables precise scanning of v-groove geometrical deviations.
• System error models and data processing algorithms were developed and analyzed.
• Experimental verification demonstrated a measurement standard deviation within 0.01°.

Conclusions:

• The on-machine measurement method significantly improves the angular accuracy of fabricated micro v-grooves.
• This technique offers a viable solution for overcoming the limitations of traditional diamond cutting methods.
• The enhanced precision in v-groove fabrication has direct implications for advanced optical component manufacturing.