Pattern matching approach to pseudosymmetry problems in electron backscatter diffraction
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Updated: Mar 31, 2026

Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope
Published on: May 28, 2016
Gert Nolze1, Aimo Winkelmann2, Alan P Boyle3
1Dept 5.1, Federal Institute for Materials, Research and Testing (BAM), Unter den Eichen 87, 12205 Berlin, Germany.
Abstract:
We demonstrate an approach to overcome Kikuchi pattern misindexing problems caused by crystallographic pseudosymmetry in electron backscatter diffraction (EBSD) measurements. Based on the quantitative comparison of experimentally measured Kikuchi patterns with dynamical electron diffraction simulations, the algorithm identifies the best-fit orientation from a set of pseudosymmetric candidates. Using measurements on framboidal pyrite (FeS2) as an example, we also show the improvement of the orientation precision using this approach.
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