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Dislocation scatterings in p-type Si(1-x)Ge(x) under weak electric field.
1Compound Device Laboratory, Samsung Advanced Institute of Technology, Gyeonggi-Do 446-712, Korea. Department of Applied Physics, Korea University, Sejong 2511, Sejong 339-700, Korea.
We developed a model for hole mobility loss in p-type Silicon Germanium (SiGe) due to charged dislocations. The model shows mobility depends on temperature, dislocation density, and germanium content, offering a criterion to minimize scattering.
Area of Science:
- Materials Science
- Semiconductor Physics
- Theoretical Physics
Background:
- Charged dislocations in semiconductor materials like Silicon Germanium (SiGe) can significantly degrade charge carrier mobility.
- Understanding and quantifying this degradation is crucial for optimizing the performance of p-type SiGe devices.
Purpose of the Study:
- To develop a theoretical model for hole mobility degradation caused by charged dislocations in p-type SiGe.
- To derive an analytical expression for dislocation mobility and identify factors influencing it.
- To establish a criterion for mitigating dislocation scattering effects.
Main Methods:
- Formulation of a theoretical model based on momentum relaxation time of hole carriers.
- Calculation of the complete analytical expression for dislocation mobility under weak electric fields.
- Analysis of the relationship between dislocation mobility and parameters like temperature, acceptor dopant density, dislocation density, and germanium composition (x).
Main Results:
- The dislocation mobility exhibits a T(3/2)/λ relationship, where T is temperature and λ is related to dislocation density.
- Dislocation mobility is directly proportional to the germanium density (x) in SiGe alloys.
- A criterion is proposed to negate scattering by dislocations based on controllable device parameters.
Conclusions:
- The theoretical model provides a quantitative understanding of hole mobility degradation in p-type SiGe due to charged dislocations.
- The derived mobility expression and scattering criterion offer valuable insights for designing high-performance SiGe-based electronic devices.
- Controlling parameters like acceptor and dislocation density, temperature, and Ge content is key to minimizing mobility degradation.
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