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Performing In Situ Closed-Cell Gas Reactions in the Transmission Electron Microscope

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Low helium permeation cells for atomic microsystems technology.

Argyrios T Dellis, Vishal Shah, Elizabeth A Donley

|June 16, 2016

Summary

This summary is machine-generated.

Aluminosilicate glass (ASG) microfabricated vapor cells significantly reduce helium permeation. These chip-scale atomic vapor cells offer improved vacuum stability for precision measurements and compact atomic clocks.

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Last Updated: Mar 19, 2026

Performing In Situ Closed-Cell Gas Reactions in the Transmission Electron Microscope

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Published on: July 24, 2021

Quantification of Hydrogen Concentrations in Surface and Interface Layers and Bulk Materials through Depth Profiling with Nuclear Reaction Analysis

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Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding

Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding

Published on: January 9, 2014

Area of Science:

Atomic, Molecular, and Optical Physics
Materials Science and Engineering
Microfabrication and Nanotechnology

Background:

Background gases in atomic vapor cells disrupt laser spectroscopy.
Helium (He) permeation through cell walls is a major vacuum contamination source.
Borosilicate glass, commonly used, has high helium permeation rates.

Purpose of the Study:

To develop microfabricated alkali vapor cells with significantly reduced helium permeation.
To assess the suitability of aluminosilicate glass (ASG) for chip-scale vapor cell fabrication.
To quantify the helium permeation rate of ASG-based cells compared to traditional materials.

Main Methods:

Fabrication of chip-scale alkali vapor cells using wafer-form aluminosilicate glass (ASG) bonded to silicon.
Measurement of helium permeation rates via the pressure shift of the hyperfine clock transition.
Comparison of helium permeation rates between ASG and borosilicate glass cells at room temperature.

Main Results:

Demonstrated microfabricated cells with helium permeation rates at least three orders of magnitude lower than borosilicate glass cells.
Identified a suitable source of ASG for wafer-scale fabrication and anodic bonding to silicon.
Successfully fabricated chip-scale alkali vapor cells utilizing ASG windows.

Conclusions:

Aluminosilicate glass (ASG) offers a substantial improvement in reducing helium permeation for microfabricated vapor cells.
These low-permeation cells are promising for compact vapor-cell atomic clocks.
The microfabricated platform is suitable for generating cold atom samples, advancing atomic physics research.