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Energy Dispersive X-ray Tomography for 3D Elemental Mapping of Individual Nanoparticles
Published on: July 5, 2016
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The Analysis of Particles at Low Accelerating Voltages (≤ 10 kV) With Energy Dispersive X-Ray Spectroscopy (EDS)
1National Institute of Standards and Technology, Gaithersburg, MD 20899-8371.
Summary
New electron beam instruments and detectors enhance elemental analysis of particles. Using lower accelerating voltages (≤ 10 kV) improves accuracy in quantitative electron-probe analysis.
Area of Science:
- Materials Science
- Analytical Chemistry
- Physics
Background:
- Advancements in electron beam instrumentation and X-ray detection offer potential for improved quantitative analysis of individual particles.
- Field-emission gun scanning electron microscopes (FEG-SEMs) provide high brightness electron beams suitable for low beam energies (≤ 10 keV).
- High-resolution energy-dispersive X-ray spectrometers, such as microcalorimeter detectors, enable precise X-ray collection and separation of low-energy lines.
Purpose of the Study:
- To investigate the potential of utilizing lower accelerating voltages (≤ 10 kV) to enhance the accuracy of elemental analysis.
- To assess the impact of advanced electron beam instruments and X-ray detectors on the quantitative analysis of micrometer-sized particles.
Main Methods:
- Utilizing field-emission gun scanning electron microscopes (FEG-SEMs) with low beam energies (≤ 10 keV).
- Employing high-resolution energy-dispersive X-ray spectrometers for detailed X-ray spectral analysis.
- Analyzing micrometer-sized particles to determine elemental composition.
Main Results:
- Advanced instruments allow for better separation of low-energy X-ray lines (e.g., K lines of C, N, O; L and M lines for Z=25-83).
- The use of accelerating voltages ≤ 10 kV shows promise for improving the accuracy of elemental analysis.
- Enhanced spectral resolution facilitates more precise identification and quantification of elements in small particles.
Conclusions:
- Recent technological advancements significantly improve the quality of quantitative electron-probe analysis for individual particles.
- Employing lower accelerating voltages (≤ 10 kV) is a viable method for increasing the accuracy of elemental analysis.
- The combination of FEG-SEMs and advanced detectors opens new possibilities for detailed elemental characterization of microparticles.
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