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Dale E Newbury1

  • 1National Institute of Standards and Technology, Gaithersburg, MD 20899-8371.

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Summary

Low voltage X-ray microanalysis offers high spatial resolution (<100 nm) by minimizing matrix effects. However, it faces challenges with detectability and peak interferences, requiring advanced spectrometry for improvement.

Keywords:
electron probe x-ray microanalyzerenergy dispersive spectrometrylow voltage microanalysisscanning electron microscopewavelength dispersive spectrometryx-ray spectrometry

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Area of Science:

  • Materials Science
  • Analytical Chemistry
  • Physics

Background:

  • Low voltage X-ray microanalysis (≤5 keV beam energy) achieves sub-100 nm spatial resolution.
  • Shallow beam penetration and low overvoltage minimize matrix effects for quantitative analysis.
  • Challenges include excitation of low energy shells, low fluorescence yield, and reduced detectability.

Purpose of the Study:

  • To explore the capabilities and limitations of low voltage X-ray microanalysis.
  • To identify factors affecting spatial resolution and quantitative accuracy.
  • To suggest future improvements in X-ray spectrometry.

Main Methods:

  • Analysis of spatial resolution dependence on beam energy and target composition.
  • Evaluation of matrix effect minimization through shallow beam penetration and low overvoltage.
  • Assessment of detectability limitations due to low fluorescence yield and peak interferences.

Main Results:

  • Achieved spatial resolution of 100 nm or less.
  • Demonstrated minimization of matrix effects in quantitative analysis.
  • Identified significant challenges in detectability and spectral resolution.

Conclusions:

  • Low voltage X-ray microanalysis provides excellent spatial resolution but suffers from detection limits.
  • Peak interferences and low fluorescence yield are key limitations.
  • Advanced techniques like X-ray optics-augmented WDS and microcalorimeter EDS are promising for future improvements.