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To be visualized by an electron microscope, either transmission or scanning, biological samples need to be fixed (stabilized) so the electron beam does not destroy them and dried thoroughly (desiccated/dehydrated) so the vacuum does not affect them. Fixation needs to be done as quickly as possible because the sample properties will start changing as soon as it is removed from its natural environment. For example, in a tissue sample, the oxygen levels begin decreasing, causing an altered...
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A scanning electron microscope (SEM) is used to study the surface features of a sample by using an electron beam that scans the sample surface in a two-dimensional manner. Typically, areas between ~1 centimeter to 5 micrometers in width can be imaged. SEM can be used to image bacteria, viruses, tissues as well as larger samples like insects. Conventional SEM gives a magnification ranging from 20X to 30,000X and spatial resolution of 50 to 100 nanometers.
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Sample preparation is an essential step in the analytical process. It involves preparing a sample so that it can be analyzed accurately. The goal is to extract the analyte, the substance you want to measure, from the sample while removing any components that may interfere with the analysis. Sample preparation techniques vary depending on the physical state of the sample.
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High Count Rate Electron Probe Microanalysis.

Journal of research of the National Institute of Standards and Technologyยท2016
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Related Experiment Video

Updated: Mar 17, 2026

Atom Probe Tomography Analysis of Exsolved Mineral Phases
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Sample Preparation for Electron Probe Microanalysis-Pushing the Limits.

Joseph D Geller1, Paul D Engle1

  • 1Geller MicroAnalytical Laboratory, Topsfield, MA 01983-1216.

Journal of Research of the National Institute of Standards and Technology
|July 23, 2016
PubMed
Summary
This summary is machine-generated.

Proper sample preparation is crucial for accurate electron probe microanalysis (EPMA). Ensuring samples are representative and have known geometries minimizes contamination and analytical errors for reliable elemental composition determination.

Keywords:
electron probe microanalysisgrindingmountingpolishingquantitative analysissample preparationsawing

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Area of Science:

  • Materials Science
  • Analytical Chemistry
  • Geoscience

Background:

  • Electron probe microanalysis (EPMA) relies on accurate conversion of X-ray intensity ratios to elemental concentrations.
  • Sample preparation is a critical, often overlooked, factor influencing EPMA accuracy.
  • Contamination and alteration during sample handling and preparation can lead to misleading analytical results.

Purpose of the Study:

  • To emphasize the fundamental considerations in preparing samples for electron probe microanalysis (EPMA).
  • To highlight the importance of sample representativeness and known geometries for accurate quantitative analysis.
  • To discuss how sample preparation techniques directly impact the analytical uncertainty budget in EPMA.

Main Methods:

  • Focus on manual, individualized sample preparation techniques tailored to diverse sample types (elements, compounds, alloys, glasses, minerals).
  • Avoidance of automated preparation methods that may not suit specialized sample requirements.
  • Emphasis on achieving precisely known sample geometries, particularly the electron beam-sample interaction geometry and X-ray takeoff angle.

Main Results:

  • Accurate sample preparation, focusing on representativeness and known geometries, is essential for reliable EPMA data.
  • Manual preparation techniques are often necessary for a wide variety of calibration standards.
  • Precise knowledge of the takeoff angle, influenced by sample preparation, is critical for ZAF correction accuracy.

Conclusions:

  • Sample preparation is a limiting factor in the analytical uncertainty of EPMA.
  • Representative samples with well-defined geometries are paramount for accurate elemental concentration determination.
  • Individualized manual preparation methods are key to achieving the necessary precision for EPMA standards.