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Self-aligned multi-channel superconducting nanowire single-photon detectors
Optics Express
|December 2, 2016
Summary
We developed a novel micromachining technique for coupling optical fibers to superconducting nanowire single photon detectors (SNSPDs). This method enhances detector performance and enables compact, multi-channel systems for photon detection.
Area of Science:
- Quantum Optics
- Nanotechnology
- Superconducting Devices
Background:
- Superconducting nanowire single photon detectors (SNSPDs) are crucial for quantum information processing and sensitive optical measurements.
- Efficient coupling of optical fibers to SNSPDs, especially in multi-channel configurations, presents a significant engineering challenge.
Purpose of the Study:
- To present a micromachining process for back-side fiber coupling to SNSPDs.
- To demonstrate a compact, multi-channel detector array with improved performance.
- To compare different integration designs for optimal efficiency and low noise.
Main Methods:
- Micromachining of silicon chips to create a back-side coupling interface.
- Integration of single-mode telecommunication fibers with individual SNSPDs.
- Fabrication and characterization of a four-detector array with two distinct designs.
Main Results:
- Achieved saturated system detection efficiency of 16% in the optimized design.
- Demonstrated a dark count rate below 20 Hz without reflectors.
- Confirmed elimination of cross-talk between detection channels.
Conclusions:
- The back-illumination approach enables compact integration of multi-channel SNSPD arrays.
- This method significantly improves detector efficiency and reduces noise.
- The developed process is suitable for various applications requiring high-performance single photon detection.

