Strain Effects in Epitaxial VO2 Thin Films on Columnar Buffer-Layer TiO2/Al2O3 Virtual Substrates

Eric Breckenfeld1, Heungsoo Kim1, Katherine Burgess1

  • 1Naval Research Laboratory , 4555 Overlook Avenue, Washington, D.C. 20375, United States.

Summary

Epitaxial vanadium dioxide (VO2) and titanium dioxide (TiO2) thin films were grown to lower the VO2 semiconductor-metal transition temperature to 44 °C. This was achieved by using a TiO2 buffer layer, which also maintained the transition

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