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A Standard and Reliable Method to Fabricate Two-Dimensional Nanoelectronics
Published on: August 28, 2018
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Sub-10 nm Nanopattern Architecture for 2D Material Field-Effect Transistors
Kai Xu1,2, Dongxue Chen1,3,4, Fengyou Yang1,2
1Chinese Academy of Sciences (CAS) Key Laboratory of Nanosystem and Hierarchy Fabrication, CAS Center for Excellence in Nanoscience, National Center for Nanoscience and Technology , Beijing 100190, China.
Nano Letters
|January 18, 2017
Summary
A novel method uses Bi2O3 corrosion to create sub-10 nm gaps, enabling ultrathin body field-effect transistors (FETs) with 8.2 nm channels. These 2D material devices show excellent performance and no short channel effects, paving the way for advanced integrated circuits.
Area of Science:
- Materials Science
- Nanotechnology
- Semiconductor Physics
Background:
- Two-dimensional materials (2DMs) offer potential as semiconductor alternatives due to their atomic thinness.
- Current nanofabrication struggles with creating ultrashort channels (<10 nm) and integrating devices, hindering performance investigations.

