Sub-10 nm Nanopattern Architecture for 2D Material Field-Effect Transistors

Kai Xu1,2, Dongxue Chen1,3,4, Fengyou Yang1,2

  • 1Chinese Academy of Sciences (CAS) Key Laboratory of Nanosystem and Hierarchy Fabrication, CAS Center for Excellence in Nanoscience, National Center for Nanoscience and Technology , Beijing 100190, China.

Nano Letters
|January 18, 2017
PubMed
Summary

A novel method uses Bi2O3 corrosion to create sub-10 nm gaps, enabling ultrathin body field-effect transistors (FETs) with 8.2 nm channels. These 2D material devices show excellent performance and no short channel effects, paving the way for advanced integrated circuits.