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Nonlinear errors induced by intermodulation in heterodyne laser interferometers.

Haijin Fu, Pengcheng Hu, Jiubin Tan

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    An abnormal harmonic in heterodyne laser interferometry measurements was identified. A new intermodulation model explains these nonlinearities, which resist traditional compensation methods.

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    Area of Science:

    • Optics and Photonics
    • Metrology
    • Nonlinear Dynamics

    Background:

    • Heterodyne laser interferometers are crucial for high-precision measurements.
    • Conventional models do not account for observed abnormal harmonics in measurement spectra.
    • These deviations suggest uncharacterized nonlinear effects impacting accuracy.

    Purpose of the Study:

    • To explain the origin of abnormal harmonics in heterodyne laser interferometer signals.
    • To develop a model for analyzing the influence of these harmonics.
    • To investigate the impact on measurement accuracy and compensation strategies.

    Main Methods:

    • Spectral analysis of measurement signals from a heterodyne laser interferometer.
    • Development of a nonlinearity model based on intermodulation.
    • Theoretical analysis of harmonic generation and error propagation.

    Main Results:

    • A striking abnormal harmonic was detected, deviating from standard frequency-domain models.
    • The proposed intermodulation model successfully explains the observed harmonic.
    • Intermodulation-induced harmonics introduce new third- and fourth-order nonlinearities.
    • These nonlinearities are opposite in sign to traditional nonlinearities.
    • The Heydemann correction is insufficient to fully compensate for these new periodic nonlinearities.

    Conclusions:

    • Intermodulation is a key mechanism for generating abnormal harmonics in heterodyne laser interferometers.
    • These nonlinearities pose a significant challenge to achieving high-accuracy measurements.
    • Existing compensation techniques like the Heydemann correction are inadequate for these newly identified nonlinear effects.