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Rotatable Offner imaging system for ellipsometric measurement.

L Jin1, T Tanaka1, E Kondoh1

  • 1Faculty of Engineering, University of Yamanashi, Kofu, 400-8511 Yamanashi, Japan.

The Review of Scientific Instruments
|February 3, 2017
PubMed
Summary
This summary is machine-generated.

A novel rotatable Offner imaging system enables high-resolution ellipsometric measurements over a large field of view. This system maintains focus across all rotations, overcoming limitations of conventional tilted setups for advanced material characterization.

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Area of Science:

  • Optical physics
  • Materials science
  • Imaging technology

Background:

  • Conventional Offner imaging systems struggle with maintaining focus when tilted for ellipsometric measurements.
  • Achieving high spatial resolution and large field of view simultaneously in imaging ellipsometry is challenging.

Purpose of the Study:

  • To develop a rotatable Offner imaging system for high spatial resolution, large field-of-view ellipsometric measurements.
  • To overcome the focal plane shift issue in tilted conventional Offner systems.

Main Methods:

  • Development of a unit magnification, rotatable Offner imaging system.
  • Integration of the system into an imaging ellipsometer.
  • Testing the prototype with silicon wafers and chromium film resolution targets.

Main Results:

  • The developed rotatable Offner system maintains the entire object in focus throughout rotations.
  • Successful generation of ellipsometric parameter maps (Δ and Ψ) for test samples.
  • Demonstrated capability for high spatial resolution imaging ellipsometry.

Conclusions:

  • The rotatable Offner system effectively addresses the focus limitations of conventional tilted setups.
  • The developed imaging ellipsometer is suitable for detailed material characterization using ellipsometric mapping.
  • This advancement facilitates precise analysis of material properties over large areas.