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High-Power Growth-Robust InGaAs/InAlAs Terahertz Quantum Cascade Lasers
Christoph Deutsch1,2, Martin Alexander Kainz1,2, Michael Krall1,2
1Photonics Institute, TU Wien, Gußhausstraße 27-29, 1040 Vienna, Austria.
Summary
High-power terahertz quantum cascade lasers were developed using InGaAs/InAlAs heterostructures. Optimization achieved a record output power of 587 mW, demonstrating excellent reproducibility for these semiconductor devices.
Area of Science:
- Optoelectronics
- Semiconductor Physics
- Quantum Cascade Lasers
Background:
- Terahertz (THz) quantum cascade lasers (QCLs) are crucial for various applications.
- InGaAs/InAlAs heterostructures offer potential for high-performance THz QCLs.
- Reproducibility and performance optimization are key challenges in THz QCL development.
Purpose of the Study:
- To investigate and optimize high-power THz QCLs using InGaAs/InAlAs heterostructures.
- To understand the impact of growth-related asymmetries on device performance.
- To achieve high output power and operating temperatures in THz QCLs.
Main Methods:
- Fabrication of InGaAs/InAlAs semiconductor heterostructures with a focus on minimizing growth-related asymmetries.
- Design and optimization of a three-well optical phonon depletion scheme for preferential electron transport.
- Characterization of device performance, including output power and operating temperature, at varying sheet doping densities.
- Utilizing a hyperhemispherical GaAs lens to enhance output power.
Main Results:
- A trade-off exists between maximum operating temperature and output power, influenced by sheet doping density.
- A maximum operating temperature of 155 K was achieved with a moderate doping density (2 × 10^10 cm^-2).
- A peak output power of 151 mW was obtained with a higher doping density (7.3 × 10^10 cm^-2).
- A record output power of 587 mW was achieved for double-metal waveguide structures by attaching a GaAs lens.
Conclusions:
- The study demonstrates the potential of InGaAs/InAlAs heterostructures for high-power THz QCLs.
- Optimization of doping density and waveguide design is critical for balancing performance metrics.
- The achieved record output power highlights the viability of these devices for advanced THz applications.

