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Published on: July 24, 2015
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The integration of graphene into microelectronic devices
Guenther Ruhl1, Sebastian Wittmann1,2, Matthias Koenig1,3
1Infineon Technologies AG, Wernerwerkstrasse 2, 93049 Regensburg, Germany.
Beilstein Journal of Nanotechnology
|July 8, 2017
Summary
Graphene integration into microelectronics shows promise, but challenges remain in deposition on dielectrics and maintaining properties during encapsulation. Research is advancing graphene/metal contacts for electronic devices.
Area of Science:
- Materials Science
- Condensed Matter Physics
- Nanotechnology
Background:
- Graphene research has surged globally since 2004.
- Graphene's unique electronic properties offer vast potential for microelectronic devices.
- Significant advancements in graphene synthesis have been achieved.
Purpose of the Study:
- To review current knowledge on graphene integration in microelectronics.
- To identify key challenges and research directions in this field.
Main Methods:
- Literature review and synthesis of existing research findings.
- Analysis of progress in graphene synthesis, deposition, and contact formation.
Main Results:
- Progress in graphene synthesis is notable.
- Challenges persist in depositing graphene on dielectric substrates.
- Encapsulation of graphene while preserving its properties is difficult.
- Substantial advancements have been made in graphene/metal contacts, reducing contact resistance.
Conclusions:
- Crucial issues for graphene integration in microelectronics are now well-defined.
- Future research tasks for successful graphene integration are clearly identified.
