TOF MS Investigation of Nickel Oxide CVD

NiO layers were deposited by metal-organic chemical vapor deposition using bis-(ethylcyclopentadienyl) nickel (EtCp)₂Ni and oxygen or ozone. As a continuation of kinetic study of NiO MOCVD the gas-phase, transformations of (EtCp)₂Ni were studied in the temperature range of 380-830 K. Time of reactions corresponding to the residence time of the gas stream in hot zone of the reactor was about 0.1 s under conditions studied. The interaction of (EtCp)₂Ni with oxygen started at 450 K and its conversion rate reached the maximum at 700 K. The interaction of (EtCp)₂Ni with ozone started at 400 K and its conversion rate reached the maximum at 600 K. Transformations of the gas phase with the temperature in the reaction zone were studied, the model reaction schemes illustrating (EtCp)₂Ni transformations in the reaction systems containing oxygen and ozone have developed. In the reaction system (EtCp)₂Ni-O₂-Ar the main gas-phase products at 380-500 K were CO, CO₂, HCO, C₂H₅OH, CpCOOH, and CpO. Formation of the C₂H₂O, C₃H₄O, and C₅H₈O was found at 630-830 K. The same gas-phase species, (C₄H₃O)₂Ni and dialdehydes was formed in the reaction system (EtCp)₂Ni-O₃-O₂-Ar. Graphical Abstract ᅟ.