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Alloy multilayers and ternary nanostructures by direct-write approach
F Porrati1, R Sachser1, G C Gazzadi2,3
1Physikalisches Institut, Goethe-Universität, Max-von-Laue-Str. 1, D-60438 Frankfurt am Main, Germany.
Nanotechnology
|August 15, 2017
Summary
Focused electron beam induced deposition (FEBID) enables direct nanopatterning of multilayer nanostructures. This technique allows for the fabrication of complex shapes with nanoscale precision for advanced optical and magnetic applications.
Area of Science:
- Materials Science
- Nanotechnology
- Physics
Background:
- Traditional fabrication of nanopatterned multilayers involves separate film preparation and lithography/etching steps.
- These conventional methods can be complex and limit design flexibility.
Purpose of the Study:
- To demonstrate a direct-write method for fabricating nanopatterned multilayers using focused electron beam induced deposition (FEBID).
- To investigate the potential of FEBID for creating nanostructures for optical and magnetic applications, including hyperbolic metamaterials.
- To explore the effects of low-energy electron irradiation on multilayer intermixing and phase transformation.
Main Methods:
- Focused electron beam induced deposition (FEBID) for direct nanopatterning.
- Alternating deposition of metal carbonyl precursors (e.g., W(CO)6, Fe(CO)5) and neopentasilane (Si(CH3)4CH(CH3)2) to create multilayer structures.
- Low-energy electron irradiation for inducing atomic intermixing.
- Transmission electron microscopy (TEM) for structural analysis.
- Electrical transport measurements to characterize material properties.
Main Results:
- FEBID successfully fabricated nanopatterned [Formula: see text] multilayers with nanoscale resolution.
- Electron irradiation induced partial intermixing in thick multilayers (n=12), primarily in the upper layers.
- Thin multilayers (n=2) subjected to electron irradiation transformed into the L21 phase of the Co2FeSi Heusler compound throughout the entire sample volume.
Conclusions:
- FEBID offers a direct and versatile route for fabricating complex multilayer nanostructures.
- Electron irradiation can be used to tune the intermixing and phase formation in these nanostructures.
- The ability to form specific phases like Co2FeSi via FEBID and irradiation opens possibilities for novel nanodevices.
