Jove
Visualize
Contact Us
JoVE
x logofacebook logolinkedin logoyoutube logo
ABOUT JoVE
OverviewLeadershipBlogJoVE Help Center
AUTHORS
Publishing ProcessEditorial BoardScope & PoliciesPeer ReviewFAQSubmit
LIBRARIANS
TestimonialsSubscriptionsAccessResourcesLibrary Advisory BoardFAQ
RESEARCH
JoVE JournalMethods CollectionsJoVE Encyclopedia of ExperimentsArchive
EDUCATION
JoVE CoreJoVE BusinessJoVE Science EducationJoVE Lab ManualFaculty Resource CenterFaculty Site
Terms & Conditions of Use
Privacy Policy
Policies

Related Experiment Video

Updated: Feb 24, 2026

Writing and Low-Temperature Characterization of Oxide Nanostructures
06:43

Writing and Low-Temperature Characterization of Oxide Nanostructures

Published on: July 18, 2014

10.5K

Alloy multilayers and ternary nanostructures by direct-write approach.

F Porrati1, R Sachser1, G C Gazzadi2,3

  • 1Physikalisches Institut, Goethe-Universität, Max-von-Laue-Str. 1, D-60438 Frankfurt am Main, Germany.

Nanotechnology
|August 15, 2017
PubMed
Summary
This summary is machine-generated.

Related Concept Videos

You might also read

Related Articles

Articles linked to this work by shared authors, journal, and citation graph.

Sort by
Same author

Vortex Ratchet Effect in a NbC Strip With a Periodic Edge Indentation.

Small methods·2025
Same author

Demonstration of angular-momentum-resolved electron energy-loss spectroscopy.

Nature communications·2025
Same author

Increasing the Resolution of Transmission Electron Microscopy by Computational Ghost Imaging.

Physical review letters·2024
Same author

Alignment of electron optical beam shaping elements using a convolutional neural network.

Ultramicroscopy·2021
Same author

Ultra-fast vortex motion in a direct-write Nb-C superconductor.

Nature communications·2020
Same author

Optimized fistulectomy using the novel FiXcision<sup>®</sup> device: a technical feasibility study and evaluation of short term healing rates.

Techniques in coloproctology·2019

Focused electron beam induced deposition (FEBID) enables direct nanopatterning of multilayer nanostructures. This technique allows for the fabrication of complex shapes with nanoscale precision for advanced optical and magnetic applications.

Area of Science:

  • Materials Science
  • Nanotechnology
  • Physics

Background:

  • Traditional fabrication of nanopatterned multilayers involves separate film preparation and lithography/etching steps.
  • These conventional methods can be complex and limit design flexibility.

Purpose of the Study:

  • To demonstrate a direct-write method for fabricating nanopatterned multilayers using focused electron beam induced deposition (FEBID).
  • To investigate the potential of FEBID for creating nanostructures for optical and magnetic applications, including hyperbolic metamaterials.
  • To explore the effects of low-energy electron irradiation on multilayer intermixing and phase transformation.

Main Methods:

  • Focused electron beam induced deposition (FEBID) for direct nanopatterning.
  • Alternating deposition of metal carbonyl precursors (e.g., W(CO)6, Fe(CO)5) and neopentasilane (Si(CH3)4CH(CH3)2) to create multilayer structures.

More Related Videos

A Method to Fabricate Disconnected Silver Nanostructures in 3D
05:45

A Method to Fabricate Disconnected Silver Nanostructures in 3D

Published on: November 27, 2012

14.2K
Laser-induced Forward Transfer of Ag Nanopaste
08:07

Laser-induced Forward Transfer of Ag Nanopaste

Published on: March 31, 2016

11.9K

Related Experiment Videos

Last Updated: Feb 24, 2026

Writing and Low-Temperature Characterization of Oxide Nanostructures
06:43

Writing and Low-Temperature Characterization of Oxide Nanostructures

Published on: July 18, 2014

10.5K
A Method to Fabricate Disconnected Silver Nanostructures in 3D
05:45

A Method to Fabricate Disconnected Silver Nanostructures in 3D

Published on: November 27, 2012

14.2K
Laser-induced Forward Transfer of Ag Nanopaste
08:07

Laser-induced Forward Transfer of Ag Nanopaste

Published on: March 31, 2016

11.9K
  • Low-energy electron irradiation for inducing atomic intermixing.
  • Transmission electron microscopy (TEM) for structural analysis.
  • Electrical transport measurements to characterize material properties.

    • Main Results:

    • FEBID successfully fabricated nanopatterned [Formula: see text] multilayers with nanoscale resolution.
    • Electron irradiation induced partial intermixing in thick multilayers (n=12), primarily in the upper layers.
    • Thin multilayers (n=2) subjected to electron irradiation transformed into the L21 phase of the Co2FeSi Heusler compound throughout the entire sample volume.

    Conclusions:

    • FEBID offers a direct and versatile route for fabricating complex multilayer nanostructures.
    • Electron irradiation can be used to tune the intermixing and phase formation in these nanostructures.
    • The ability to form specific phases like Co2FeSi via FEBID and irradiation opens possibilities for novel nanodevices.