One-Dimensional Modeling Studies of the Gaseous Electronics Conference RF Reference Cell

T R Govindan1, M Meyyappan1

  • 1Scientific Research Associates, Inc., P.O. Box 1058, Glastonbury, CT 06033-6058.

Summary

This review covers one-dimensional plasma modeling studies for the Gaseous Electronics Conference (GEC) reference reactor. These fluid and hybrid models enhance understanding of plasma discharge mechanisms and experimental features.

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