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Real-Time and In-Flow Sensing Using a High Sensitivity Porous Silicon Microcavity-Based Sensor.
Raffaele Caroselli1, David Martín Sánchez2, Salvador Ponce Alcántara3
1Nanophotonics Technology Center (NTC), Universitat Politècnica de València, 46022 Valencia, Spain. rcaroselli@ntc.upv.es.
Sensors (Basel, Switzerland)
|December 6, 2017
Summary
This study developed a low-cost, high-sensitivity porous silicon microcavity sensor for real-time optical sensing. The sensor achieved a sensitivity of 1000 nm/RIU, enabling detection of minute refractive index changes.
Area of Science:
- Materials Science
- Nanotechnology
- Optical Engineering
Background:
- Porous silicon (PS) offers a cost-effective platform for optical sensors due to its tunable optical properties and large surface area.
- The inherent porosity of PS enhances light-matter interactions, crucial for sensitive detection of analytes.
- Developing high-sensitivity, low-cost optical sensors is vital for various applications, including environmental monitoring and medical diagnostics.
Purpose of the Study:
- To experimentally develop and characterize a porous silicon microcavity (PSM) sensor.
- To demonstrate the sensor's capability for real-time in-flow refractive index sensing.
- To evaluate the sensitivity and linearity of the PSM sensor for detecting small refractive index variations.
Main Methods:
- Fabrication of a porous silicon microcavity using electrochemical etching of a silicon wafer.
- Real-time refractive index sensing experiments involving the flow of solutions with varying refractive indices.
- Spectroscopic analysis to measure the spectral shift in response to refractive index changes.
Main Results:
- The fabricated porous silicon microcavity sensor exhibited a highly linear response across a broad refractive index range.
- A remarkable sensitivity of approximately 1000 nm/refractive index unit (RIU) was achieved.
- The sensor demonstrated the ability to detect refractive index variations as small as 10-7 RIU.
Conclusions:
- Porous silicon microcavity sensors are a promising technology for developing high-performance, cost-effective optical sensing devices.
- The demonstrated sensitivity and real-time capabilities make this sensor suitable for demanding in-flow sensing applications.
- The simple and inexpensive fabrication process further enhances the potential for widespread adoption of these sensors.

