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A Dual-Butterfly Structure Gyroscope.

Xiangming Xu1, Dingbang Xiao2, Wenyin Li3

  • 1College of Mechatronics Engineering and Automation, National University of Defense Technology, Changsha 410073, China. xuxiangming15@nudt.edu.cn.

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|December 14, 2017
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Summary
This summary is machine-generated.

A novel dual-butterfly gyroscope structure enhances performance by increasing signal differences. This design improves bias instability and g-sensitivity for MEMS gyroscopes.

Keywords:
butterfly gyroscopecouplingquad differential

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Area of Science:

  • Mechanical Engineering
  • Microelectromechanical Systems (MEMS)

Background:

  • Traditional butterfly structure gyroscopes face limitations in bias instability and g-sensitivity.
  • Improving the performance of micro-gyroscopes is crucial for navigation and control systems.

Purpose of the Study:

  • To introduce and evaluate a novel dual-butterfly structure gyroscope.
  • To investigate the potential of the dual-butterfly structure to enhance gyroscope performance metrics.

Main Methods:

  • Fabrication of the dual-butterfly gyroscope using standard microfabrication techniques.
  • Experimental testing under laboratory conditions to assess performance.
  • Analysis of Q-factor, frequency response, scale factor, and bias instability using Allan Variance.

Main Results:

  • Achieved a Q-factor of 10,967 in driving mode.
  • Observed two peaks in the sensing direction frequency response due to fabrication errors.
  • Measured a scale factor of 10.9 mV/°/s and bias instability of 10.7°/h.

Conclusions:

  • The dual-butterfly structure gyroscope demonstrates potential for improved bias instability and g-sensitivity.
  • Fabrication errors can impact frequency response, necessitating further optimization.
  • The proposed structure offers a promising advancement in MEMS gyroscope technology.