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Updated: May 23, 2026
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Fabrication of Silica Ultra High Quality Factor Microresonators
Published on: July 2, 2012
Manufacturing of 8 million Q-factor micro hemispherical resonator gyroscopes via patterned coating technology
Feng Zhu1,2, Xuezhong Wu3,4, Yan Shi5,6
1College of Intelligence Science and Technology, National University of Defense Technology, Changsha, China.
Microsystems & Nanoengineering
|May 21, 2026
Summary
A novel patterned coating technique significantly enhances micro hemispherical resonator gyroscopes (mHRGs). This method improves the Q-factor and reduces frequency splitting, boosting inertial navigation system performance.
Area of Science:
- Materials Science
- Mechanical Engineering
- Physics
Background:
- Micro hemispherical resonator gyroscopes (mHRGs) are crucial for high-precision inertial navigation systems (INS).
- Traditional continuous thin film coatings on mHRGs cause significant damping, reducing Q-factor and limiting accuracy.
- Improving mHRG performance requires minimizing damping and enhancing Q-factor and frequency splitting control.
Purpose of the Study:
- To develop and validate a patterned coating technique for mHRGs using magnetron sputtering.
- To investigate the impact of patterned Ti/Pt thin films on mHRG Q-factor, uniformity, and frequency splitting.
- To establish a theoretical model correlating film patterns with device performance for high-performance mHRGs.
Main Methods:
- Utilized magnetron sputtering physical vapor deposition with 3D masks for high-precision patterned deposition of Ti/Pt thin films on complex mHRG surfaces.
- Characterized the performance of packaged mHRG devices, measuring Q-factor, circumferential Q-factor uniformity, and frequency splitting.
- Analyzed the damping mechanism of patterned films and developed a correlation model based on harmonic error analysis theory.
Main Results:
- Achieved a Q-factor loss rate of less than 14% and a measured Q-factor exceeding 8x10^6.
- Demonstrated superior performance compared to traditional coating processes, with circumferential Q-factor uniformity better than 1% and frequency splitting within 1 mHz.
- Mechanism analysis confirmed that reduced film coverage in patterned designs minimizes damping from grain boundaries and interfaces.
Conclusions:
- The proposed patterned coating process significantly enhances mHRG Q-factor and suppresses non-uniformity and frequency splitting.
- The developed correlation model provides theoretical support for optimizing film patterns to ensure consistent gyroscope performance.
- This technique offers a viable solution for producing high-performance mHRGs for advanced inertial navigation applications.
