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Integrated Optoelectronic Position Sensor for Scanning Micromirrors.

Xiang Cheng1, Xinglin Sun2, Yan Liu3

  • 1School of Aerospace Engineering, Xiamen University, Xiamen 361005, China. chengflying@xmu.edu.cn.

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|March 29, 2018
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Summary
This summary is machine-generated.

This study introduces an integrated optoelectronic position sensor (iOE-PS) for Micro-electromechanical Systems (MEMS) scanning mirrors. This innovation enhances MEMS mirror functionality by adding precise position sensing capabilities.

Keywords:
MEMS mirrorMOEMSQPDmicromirroroptoelectronic position sensorposition sensor

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Area of Science:

  • Optoelectronics
  • MEMS Technology
  • Integrated Circuits

Background:

  • Scanning micromirrors are widely used but often lack integrated position sensing, limiting their applications.
  • Existing solutions for position sensing in MEMS mirrors can be complex and costly.

Purpose of the Study:

  • To develop and demonstrate an integrated optoelectronic position sensor (iOE-PS) for electrothermal MEMS scanning mirrors.
  • To enable precise measurement of linear displacement and tilting angle.
  • To reduce the complexity and cost of MEMS mirror systems.

Main Methods:

  • Fabrication of the iOE-PS chip using a standard 0.5 μm CMOS process.
  • Integration of a laser diode, quadrant photo-detector (QPD), and readout circuits on a single chip.
  • Packaging the iOE-PS chip beneath an electrothermally-actuated MEMS mirror.

Main Results:

  • The iOE-PS chip has a footprint of 5 mm × 5 mm.
  • The QPD features quadrant areas of 500 µm × 500 µm with 500 μm spacing.
  • Demonstrated linear response for vertical mirror movement (2.0–3.0 mm) and scanning angles (-5 to +5°).

Conclusions:

  • The developed iOE-PS effectively measures linear displacement and tilting angles of MEMS scanning mirrors.
  • Integration of iOE-PS significantly simplifies and reduces the cost of MEMS mirror modules and systems.
  • This technology broadens the application scope of MEMS scanning mirrors.