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Updated: Feb 12, 2026

Soft Lithographic Functionalization and Patterning Oxide-free Silicon and Germanium
Published on: December 16, 2011
Germanium as a scalable sacrificial layer for nanoscale protein patterning.
Bochao Lu1, Michel M Maharbiz1,2,3
1UC Berkeley-UCSF Graduate Program in Bioengineering, University of California, Berkeley, CA, United States of America.
Germanium films serve as water-soluble masks for precise protein patterning on surfaces using organic solvents. This scalable nanotechnology is compatible with lithography and preserves protein activity after removal.
Area of Science:
- Materials Science
- Surface Chemistry
- Nanotechnology
Background:
- Protein patterning is crucial for biosensors and tissue engineering.
- Existing methods often struggle with organic solvent compatibility or scalability.
- Need for robust, high-resolution patterning techniques compatible with microfabrication.
Purpose of the Study:
- To introduce germanium (Ge) films as a novel sacrificial layer for protein patterning.
- To demonstrate the compatibility of this technique with organic solvents and standard lithography.
- To assess the preservation of protein activity after Ge removal.
Main Methods:
- Utilizing germanium films as sacrificial masks during surface functionalization.
- Employing organic solvents for protein patterning.
- Dissolving germanium in hydrogen peroxide (H2O2) solution for removal.
- Characterizing protein activity (biotin, streptavidin) post-removal.
Main Results:
- Germanium films effectively mask surfaces during protein patterning with organic solvents.
- Complete removal of 50 nm Ge layers in 10 minutes without residues.
- Achieved nanoscale resolution using conventional photolithography.
- Maintained significant protein activity (>80% for biotin, >50% for streptavidin) after H2O2 treatment.
- Demonstrated successful protein functionalization of sidewalls.
Conclusions:
- Germanium films offer a scalable, versatile solution for protein patterning compatible with microfabrication.
- The technique preserves protein functionality, enabling advanced applications in biosensing and cell adhesion studies.
- This method provides high-resolution patterning capabilities suitable for next-generation devices.
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