Related Experiment Video
Updated: Feb 11, 2026

The Effect of Anodization Parameters on the Aluminum Oxide Dielectric Layer of Thin-Film Transistors
Published on: May 24, 2020
Effects of Various Passivation Layers on Electrical Properties of Multilayer MoS₂ Transistors
1School of Electronic Engineering, Soongsil University, Seoul 06978, Republic of Korea.
Abstract:
So far many of research on transition metal dichalcogenides (TMDCs) are based on a bottomgate device structure due to difficulty with depositing a dielectric film on top of TMDs channel layer. In this work, we study different effects of various passivation layers on electrical properties of multilayer MoS2 transistors: spin-coated CYTOP, SU-8, and thermal evaporated MoOX. The SU-8 passivation layer alters device performance least significantly, and MoOX induces positive threshold voltage shift of ~8.0 V due to charge depletion at the interface, and the device with CYTOP layer exhibits decreased field-effect mobility by ~50% due to electric dipole field effect of C-F bonds in the end groups. Our results imply that electrical properties of the multilayer MoS2 transistors can be modulated using a passivation layer, and therefore a proper passivation layer should be considered for MoS2 device structures.
Related Concept Videos
MOS Capacitor
The metal gate is typically made from highly conductive materials such as aluminum or polysilicon. Beneath the metal gate lies a thin layer of...
Sources and Properties of Electric Charge
Most atoms additionally constitute another fundamental particle, the neutron. It carries no electrical charge. A...
Properties of Electric Field Lines
For one, the electric field of a positive charge must originate from it. That is because its electric field points away from it. Moreover, since the magnitude of the field asymptotes to zero at infinity, the...
Field Effect Transistor
Bipolar Junction Transistor
Passive Filters
Low-Pass Filters
Low-pass filters are designed to transmit signals with frequencies lower than the cutoff frequency, ωc, and attenuate those above it. The cutoff...

