Related Experiment Video
Updated: Feb 11, 2026

Fabrication of Micro-Patterned Chip with Controlled Thickness for High-Throughput Cryogenic Electron Microscopy
Published on: April 21, 2022
Measurement of two-dimensional thickness of micro-patterned thin film based on image restoration in a spectroscopic
Abstract:
In this paper, we introduce a method to overcome the limitation of thickness measurement of a micro-patterned thin film. A spectroscopic imaging reflectometer system that consists of an acousto-optic tunable filter, a charge-coupled-device camera, and a high-magnitude objective lens was proposed, and a stack of multispectral images was generated. To secure improved accuracy and lateral resolution in the reconstruction of a two-dimensional thin film thickness, prior to the analysis of spectral reflectance profiles from each pixel of multispectral images, the image restoration based on an iterative deconvolution algorithm was applied to compensate for image degradation caused by blurring.
Related Concept Videos
Restorative Care
Imaging Studies VII: Vascular Imaging
Dimensional Analysis
Conversion Factors and Dimensional Analysis
The unit...
X-ray Imaging
Brain Imaging
These technologies include computerized axial tomography (CAT or CT scans), positron-emission tomography (PET scans), magnetic resonance imaging (MRI), functional magnetic resonance imaging (fMRI), and Transcranial Magnetic...
Imaging Studies IV: Magnetic Resonance Imaging

