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Updated: Feb 5, 2026
06:51
Microparticle Manipulation by Standing Surface Acoustic Waves with Dual-frequency Excitations
Published on: August 21, 2018
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Characterization of Pd/Y multilayers with B4C barrier layers using GIXR and X-ray standing wave enhanced HAXPES
M Y Wu1, Q S Huang2, K Le Guen1
1Laboratoire de Chimie Physique - Matière et Rayonnement, Sorbonne University, UMR CNRS 7614, 4 Place Jussieu, 75005 Paris, France.
Journal of Synchrotron Radiation
|September 5, 2018
Summary
Boron carbide (B4C) barrier layers effectively reduce interdiffusion in Palladium/Yttrium (Pd/Y) multilayers, enhancing their performance as high-reflectance mirrors. These layers stabilize interfaces by forming Y-B or Y-C compounds.
Area of Science:
- Materials Science
- Thin Film Technology
- Nanotechnology
Background:
- Palladium/Yttrium (Pd/Y) multilayers are crucial for high-reflectance mirrors in the 7.5-11 nm wavelength range.
- Interdiffusion between Pd and Y layers can degrade multilayer performance.
- Boron carbide (B4C) barrier layers are investigated to mitigate this interdiffusion.
Purpose of the Study:
- To evaluate the effectiveness of B4C barrier layers in reducing Pd-Y interdiffusion in multilayer structures.
- To characterize the interfacial reactions and composition of Pd/Y multilayers with and without B4C.
- To understand the role of B4C in stabilizing the interfaces for improved mirror performance.
Main Methods:
- Magnetron sputtering for sample preparation.
- Grazing-incident X-ray reflectometry for multilayer characterization.
- Hard X-ray photoemission spectroscopy with X-ray standing wave effects for elemental composition and depth distribution analysis.
Main Results:
- B4C barrier layers significantly reduce Pd-Y interdiffusion.
- Pd does not chemically react with B or C at the Pd-B4C interface.
- Y reacts with B4C at the Y-B4C interface, forming Y-B or Y-C chemical compounds, which stabilizes the interfaces.
Conclusions:
- B4C barrier layers are effective in preventing Pd-Y interdiffusion in multilayer mirrors.
- The chemical reactions at the Y-B4C interface are key to interface stabilization.
- The study provides detailed insights into multilayer composition and depth distribution for advanced optical applications.
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