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Modelling and Experimental Verification of Step Response Overshoot Removal in Electrothermally-Actuated MEMS Mirrors

Mengyuan Li1,2, Qiao Chen3, Yabing Liu3

  • 1School of Information and Electronics, Beijing Institute of Technology, Beijing 100081, China. limengyuan@ufl.edu.

Micromachines
|November 8, 2018
PubMed

Keywords:
bimorphelectro-thermal actuatormicro-electro-mechanical system (MEMS) mirrorovershootresonance frequencyringingthermal modelling

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