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A Microfluidic-Based Fabry-Pérot Gas Sensor.

Jin Tao1, Qiankun Zhang2, Yunfeng Xiao3

  • 1State Key Laboratory of Precision Measurement Technology and Instruments, School of Precision Instruments and Opto-Electronics Engineering, Tianjin University, Tianjin 300072, China. taojin@tju.edu.cn.

Micromachines
|November 9, 2018
PubMed
Summary

A novel micro-gas detector utilizes a Fabry-Pérot (FP) cavity within a microfluidic channel for sensitive gas detection. This innovative device offers versatile, fast, and non-disruptive gas analysis, enhancing sensing capabilities.

Keywords:
MEMSmicro Fabry-Pérot cavitymicro gas sensormicrofluidic channeloptical fiber

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Area of Science:

  • Microfluidics
  • Optical Sensing
  • Gas Detection

Background:

  • Microfluidic devices offer miniaturized platforms for chemical analysis.
  • Optical interferometry, specifically Fabry-Pérot cavities, can be used for high-sensitivity measurements.
  • Accurate and versatile gas detection is crucial for environmental monitoring and industrial processes.

Purpose of the Study:

  • To develop a micro-gas detector integrated with a Fabry-Pérot cavity in a microfluidic channel.
  • To demonstrate a novel detection mechanism based on interference spectrum shifts.
  • To evaluate the detector's sensitivity, versatility, and response time for various gas analytes.

Main Methods:

  • Fabrication of a microfluidic Fabry-Pérot cavity by bonding a micro-grooved glass slide to a silicon substrate.
  • Integration of an optical fiber into the microfluidic cavity to generate an interference spectrum.
  • Monitoring shifts in the interference spectrum caused by changes in the refractive index due to gas analytes.

Main Results:

  • The detector successfully sensed various organic and inorganic gases, showing distinct responses.
  • Achieved a high sensitivity of 812.5 nm/RIU (refractive index unit).
  • Demonstrated a low detection limit of 1.2 × 10-6 RIU, with a minimum resolvable wavelength shift of 1 pm.

Conclusions:

  • The developed microfluidic Fabry-Pérot gas detector is versatile and sensitive.
  • The non-disruptive detection mechanism allows for integration with other sensors.
  • The fast response time makes it suitable for applications like gas chromatography.