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Nonlinear Dynamic Behavior of a Bi-Axial Torsional MEMS Mirror with Sidewall Electrodes

Mehmet Ozdogan1,2, Shahrzad Towfighian3

  • 1Mechanical Engineering Department, State University of New York at Binghamton, Binghamton, NY 13902, USA. mozdoga1@binghamton.edu.

Micromachines
|November 9, 2018
PubMed

Keywords:
MEMS micro-mirrorbi-axial mirrornonlinear dynamicssecondary resonancessidewall electrodessoftening behavior

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