Related Experiment Video
Updated: Feb 2, 2026

Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS
Published on: June 17, 2017
Method of Calculating the Inductance Value of MEMS Suspended Inductors with Silicon Substrates
Yiyuan Li1, Jianhua Li2, Lixin Xu3
1School of Mechatronical Engineering, Beijing Institute of Technology, Beijing 100081, China. lyy510@bit.edu.cn.
Abstract:
Microelectromechanical system (MEMS) suspended inductors have excellent radio-frequency (RF) performance. The inductance value is one of the main features that characterizes the performance of inductors. It is important to consider the influence of the substrate and the suspension height in calculating the inductance value accurately. In this paper, a method is proposed to calculate the inductance value of the MEMS suspended inductor wire with a silicon substrate, as the wire is the basic component of the inductor coil. Then the method is extended to the suspended inductors consisting of a single turn coil. The calculation results obtained by this proposed method were verified by finite-element analysis (HFSS) and they were found to agree well with the results of the HFSS simulation.
Related Concept Videos
Calculation of Self-inductance
Since the effect of the induced electric field and the back EMF generated depends on the rate of change of current and the self-inductance, the inductance...
Inductors
Inductors
Inductor in an AC Circuit
Energy Stored in Inductors
In terms of gauging the energy stored within an inductor, it is equivalent to the integral of the power delivered at every individual moment, all...
Series and Parallel Inductors
For a series connection of N inductors, each carrying the same current, applying Kirchhoff's voltage law unveils a crucial relationship. Substituting the expression for...

