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In situ TEM of Biological Assemblies in Liquid
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Effects Associated with Nanostructure Fabrication Using In Situ Liquid Cell TEM Technology
Xin Chen1,2, Lihui Zhou3, Ping Wang4
11Shanghai Key Laboratory of Advanced Polymeric Materials, and Key Laboratory for Ultrafine Materials of Ministry of Education, School of Materials Science and Engineering, East China University of Science and Technology, 130 Meilong Road, Shanghai, 200237 People's Republic of China.
Nano-Micro Letters
|November 23, 2018
Summary
This study demonstrates controllable fabrication of silicon, carbon, and silicon carbide nanostructures using liquid-phase electron-beam-induced deposition. The findings enable precise control over nanodot size and morphology for advanced material applications.
Area of Science:
- Materials Science
- Nanotechnology
- Surface Science
Background:
- Electron-beam-induced deposition (EBID) is a powerful nanofabrication technique.
- Controlling nanostructure morphology and size is crucial for advanced applications.
- Liquid-phase EBID offers unique advantages for material synthesis.
Purpose of the Study:
- To investigate the fabrication of silicon, carbon, and silicon carbide (SiC) nanostructures using liquid-phase EBID.
- To understand the influence of precursor concentration and electron beam parameters on nanostructure formation.
- To explore the potential for generating various nanostructure morphologies, including nanodots and lines.
Main Methods:
- Utilized transmission electron microscopy (TEM) systems for nanostructure fabrication.
- Employed liquid-phase electron-beam-induced deposition (EBID) with varying precursor concentrations (SiCl4 in CH2Cl2).
- Investigated fixed and scanning electron beam irradiation modes.
Main Results:
- Achieved universal size versus beam dose trends for nanodots, indicating good deposition controllability.
- Identified the role of secondary electrons in determining lateral nanostructure size.
- Observed that the primary beam influences vertical growth rate, enabling donut-shaped nanostructures.
- Fabricated branched and unbranched line structures using scanning electron beams.
Conclusions:
- Liquid-phase EBID is an effective method for advanced nanostructured material generation.
- Precise control over nanostructure dimensions and morphology is achievable.
- The findings provide insights into the mechanisms governing EBID in liquid precursors.
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