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Updated: Feb 2, 2026

Gain-compensation Methodology for a Sinusoidal Scan of a Galvanometer Mirror in Proportional-Integral-Differential Control Using Pre-emphasis Techniques
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Gain-compensation Methodology for a Sinusoidal Scan of a Galvanometer Mirror in Proportional-Integral-Differential Control Using Pre-emphasis Techniques

Published on: April 4, 2017

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Integrated tilt angle sensing for large displacement scanning MEMS mirrors.

Yan Liu, Yongjian Feng, Xinglin Sun

    Optics Express
    |November 25, 2018
    PubMed
    Summary

    This study introduces an integrated tilt angle sensing method for micro-electro-mechanical systems (MEMS) Fourier transform spectrometers (FTS). This innovation enhances MEMS FTS performance by enabling precise tilt control, crucial for miniaturized optical systems.

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