Improving the sensitivity of X-ray microanalysis in the analytical electron microscope
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Updated: Feb 1, 2026

Measurement of Total Calcium in Neurons by Electron Probe X-ray Microanalysis
Published on: November 20, 2013
1Photon Science Division, Argonne National Laboratory, Argonne, IL 60439, United States.
Abstract:
A study of the influence of experimental parameters on the sensitivity of x-ray energy dispersive spectroscopy in the analytical electron microscope from 20-200 kV is conducted. Optimization of conditions in the next generation of aberration corrected AEM instrument coupled with an array configuration of SDD detectors can potentially yield a 10-20 fold improvement over older Si(Li) systems still in use today.
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