Related Experiment Video
Updated: Jan 30, 2026
15:25
Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
6.6K
Implementation of a CMOS/MEMS Accelerometer with ASIC Processes
1Institute of Electronic Engineering, National Chiao Tung University, Hsinchu 300, Taiwan. thomas.ee02g@nctu.edu.tw.
Micromachines
|January 16, 2019
Summary
This study introduces a novel tri-axis accelerometer combining CMOS and MEMS technology. Fabricated using a 0.18 μm process, it achieves a resonant frequency of 5.35 kHz.
Area of Science:
- Micro-electromechanical systems (MEMS)
- Integrated circuit technology
Background:
- Development of miniaturized inertial sensors is crucial for various applications.
- Existing accelerometers face challenges in integration and performance.
Purpose of the Study:
- To present the design, simulation, and characterization of a novel CMOS/MEMS tri-axis accelerometer.
- To demonstrate the feasibility of monolithic integration for improved sensor performance.
Main Methods:
- Utilized a 0.18 μm application-specific integrated circuit (ASIC)-compatible CMOS/MEMS fabrication process.
- Developed an approximate analytical model for spring design.
- Performed mechanical characterization and resonant frequency analysis.
Main Results:
- Successfully fabricated a monolithic CMOS/MEMS tri-axis accelerometer.
- Achieved a resonant frequency of approximately 5.35 kHz for out-of-plane vibration.
- The device occupies a compact area of 1096 μm × 1256 μm.
Conclusions:
- The proposed design offers a viable solution for integrated tri-axis accelerometers.
- The CMOS/MEMS approach enables miniaturization and potentially enhanced performance.
- Further research can explore optimization for specific application requirements.
Related Concept Videos
01:25Role of Communication in the Nursing Process II: Planning and Implementation
2.7K
Several factors are considered while creating a patient's care plan. Motivation is a factor in improving communication, and patients often require encouragement to try different approaches involving significant change. It is essential to involve the patient and family in decisions about the plan of care to determine whether the suggested methods are acceptable. Consider meeting critical comfort and safety needs before introducing new communication methods and techniques. Allow adequate time...
2.7K
01:24Nursing Process for Patient and Caregiver Teaching II: Planning and Implementation
2.1K
Planning for learning involves the development of a teaching plan. Teaching plans are similar to nursing care plans—both follow the steps of the nursing process. Planning in the teaching process involves setting goals and outcomes. Here, goals identify what a patient needs to achieve to understand a healthcare topic better, whereas the outcomes are the action to be performed by the patient to achieve the goal within a timeframe. For example, if the goal is to educate the patient about...
2.1K
01:15Nursing Implementation
6.2K
Implementation is the execution of the nursing care plan developed during the planning phase.
The five steps to implementing effective nursing care include reassessing the patient, reviewing and revising the existing nursing care plan, organizing the resources and care delivery, anticipating and preventing complications, and implementing nursing interventions.
The five steps to implementing effective nursing care include reassessing the patient, reviewing and revising the existing nursing care plan, organizing the resources and care delivery, anticipating and preventing complications, and implementing nursing interventions.
6.2K
01:20Parallel Processing
713
The brain processes sensory information rapidly due to parallel processing, which involves sending data across multiple neural pathways at the same time. This method allows the brain to manage various sensory qualities, such as shapes, colors, movements, and locations, all concurrently. For instance, when observing a forest landscape, the brain simultaneously processes the movement of leaves, the shapes of trees, the depth between them, and the various shades of green. This enables a quick and...
713
01:30Information Processing Approach
564
The information-processing theory of cognitive development centers on fundamental mental processes, including attention, memory, and problem-solving skills. Researchers in this field examine how cognitive abilities, such as working memory, evolve and influence children's overall development. Studies indicate that children with stronger working memory tend to excel in reading comprehension, math, and problem-solving compared to peers with less efficient memory skills. Low working memory is...
564
01:29Processes of Self-Presentation
248
Effective self-presentation is a central component of social interaction and identity construction. It relies on the dynamic processes of defining the situation and engaging in self-disclosure. These mechanisms help individuals navigate social context expectations and manage how others perceive them, fostering mutual understanding and relationship development.Defining the SituationSocial situations are shaped by collectively understood frames—a set of widely understood rules or...
248