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Updated: Jan 29, 2026

Using Micro-Electro-Mechanical Systems MEMS to Develop Diagnostic Tools
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Design and Analysis of the Elastic-Beam Delaying Mechanism in a Micro-Electro-Mechanical Systems Device

Fufu Wang1, Lu Zhang2, Long Li3

  • 1Key Laboratory of Space Utilization, Technology and Engineering Center for space Utilization, Chinese Academy of Sciences, Beijing 100094, China. wangfufu2004@sina.com.

Micromachines
|February 5, 2019
PubMed

Keywords:
delaying mechanismmicro-electro-mechanical systems (MEMS)safety and arming system

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