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Updated: Jan 28, 2026

Development of an Experimental Setup for the Measurement of the Coefficient of Restitution under Vacuum Conditions
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Experimental Setup for Dynamic Analysis of Micro- and Nano-Mechanical Systems in Vacuum, Gas, and Liquid

Bram van den Brink1, Farbod Alijani2, Murali Krishna Ghatkesar3

  • 1Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628CD Delft, The Netherlands.

Micromachines
|March 1, 2019
PubMed

Keywords:
AFMAtomic Force Microscopydynamicsexperimental modal analysisfluidliquidmicro-cantileversmicrosystemsmodal testingvacuumvibrationvibration analysis

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