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Tile-and-trim micro-resonator array fabrication optimized for high multiplexing factors.

Christopher M McKenney1, Jason E Austermann1, James A Beall1

  • 1National Institute of Standards and Technology, Boulder, Colorado 80305, USA.

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We developed a scalable superconducting micro-resonator array fabrication method using photolithography tiles. This technique optimizes high multiplexing factors for detector arrays, improving yield for applications like the BLAST-TNG instrument.

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Area of Science:

  • Superconducting devices
  • Detector arrays
  • Photolithography

Background:

  • Superconducting micro-resonator arrays are crucial for sensitive detectors.
  • Current fabrication methods face limitations in scalability and reconfigurability.
  • Optimizing for high multiplexing factors is essential for advanced instrumentation.

Purpose of the Study:

  • To present a scalable and reconfigurable fabrication method for superconducting micro-resonator arrays.
  • To optimize the fabrication for high multiplexing factors.
  • To demonstrate the method's effectiveness using a titanium-nitride microwave kinetic inductance detector array.

Main Methods:

  • Utilized uniformly sized tiles patterned on stepper photolithography reticles as array building blocks.
  • Fabricated a 101-element microwave kinetic inductance detector (MKID) array using titanium-nitride superconducting film.
  • Characterized frequency spacing deviations across the wafer.

Main Results:

  • Demonstrated a scalable and reconfigurable fabrication method.
  • Observed maximum fractional frequency spacing deviations of 1.5% due to smooth material variations.
  • Found local frequency spacing deviations followed a Gaussian distribution with a standard deviation of 2.7 × 10-3.
  • Increased the yield of a 1836-element polarization-sensitive MKID array for the BLAST-TNG instrument by optimizing resonator placement.

Conclusions:

  • The developed fabrication method is scalable, reconfigurable, and optimized for high multiplexing.
  • The understanding of frequency spacing deviations allows for increased detector array yield.
  • The achieved yield is comparable to other low-temperature detector technologies.