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Development of Silicon Micromachined Waveguide Filter-Banks for On-Chip Spectrometers.
Matthew A Koc1, Jason Austermann2, James Beall2
1Department of Physics, University of Colorado, Boulder, CO 80309 USA, and also with the Quantum Sensors Division, National Institute of Standards and Technology, Boulder, CO 80305 USA.
IEEE Transactions on Applied Superconductivity : a Publication of the IEEE Superconductivity Committee
|May 18, 2026
Summary
Researchers developed a novel silicon waveguide filter-bank for millimeter spectroscopy, enhancing optical efficiency and spectral resolution. This technology advances astronomical observations and line intensity mapping capabilities.
Area of Science:
- Astronomy and Cosmology
- Spectroscopy
- Optical Engineering
Background:
- High-speed, spatial-mapping spectrometers are crucial for advancing astronomy and cosmology.
- On-chip spectrometers offer potential for Line Intensity Mapping.
- Existing high-speed imaging devices often have low optical efficiency, limiting their application.
Purpose of the Study:
- To present the fabrication of a metalized silicon waveguide filter-bank for millimeter spectroscopy.
- To address the limitation of low optical efficiency in current spectrometer designs.
- To enable high-density pixel packing, high optical efficiency, and high spectral resolution.
Main Methods:
- Fabrication of a metalized silicon waveguide filter-bank using deep reactive ion etching.
- Design for compatibility with multiplexable Microwave Kinetic Inductance Detector (MKID) arrays.
- Testing of gold-plated waveguide and filter components at room temperature.
Main Results:
- The fabricated filter-bank demonstrates high-density pixel packing, high optical efficiency, and high spectral resolution.
- Measured resolving power of 263 and a loss quality factor of 1116 at room temperature.
- Excellent agreement between experimental results and simulations for gold-plated test components.
Conclusions:
- The developed silicon waveguide filter-bank shows significant promise for millimeter spectroscopy.
- This technology can overcome limitations of low optical efficiency in current devices.
- The design is suitable for extending measurements to larger, multiwavelength astronomical instruments.
